'Power of disorder' tames CF₄, a semiconductor greenhouse gas that can persist for 50,000 years
Phys.org ·
Among the gases used in semiconductor manufacturing, tetrafluoromethane (CF₄) is a greenhouse gas more than 6,000 times as potent as carbon dioxide.
Among the gases used in semiconductor manufacturing, tetrafluoromethane (CF₄) is a greenhouse gas more than 6,000 times as potent as carbon dioxide.